Multi-stack cure system and method of operating the same

摘要

Provided is a multi-stack cure system. The system includes a chamber having an inlet port and an outlet port. A magazine is mounted in the chamber. A plurality of substrates having encapsulants are loaded in the magazine. A heater is mounted at the chamber and serves to heat the plurality of substrates having the encapsulants. A loading unit is positioned adjacent the inlet port. The loading unit has a transfer device and a push bar. A substrate recognition device is mounted in the loading unit. A control device is connected to the substrate recognition device. The inlet port has a size larger than each of the plurality of substrates having the encapsulants and smaller than the magazine.

主权项

1. A multi-stack cure system comprising:
a chamber having an inlet port and an outlet port; a magazine in the chamber, wherein a plurality of substrates having encapsulants is loaded into the magazine; a heater mounted at the chamber, the heater constructed and arranged to heat the plurality of substrates having the encapsulants; a loading unit adjacent to the inlet port and having a transfer device and a push bar; a substrate recognition device at the loading unit; and a control device coupled to the substrate recognition device, wherein the inlet port has a size that is larger than each of the plurality of substrates having the encapsulants and smaller than the magazine.