| 摘要 |
Provided is a probe card for two measurement temperatures. For electrical test of a test target placed on a work bench in which a heat source is assembled, the electrode of the test target and a tester are connected. The probe card includes: a circuit board on which a conducting path connected to a tester is formed; a probe substrate on which a conducting path corresponding to the conducting path of the circuit board is formed and which includes a probe connected to the conducting path; and a thermal expansion adjustment member which is combined to the probe substrate, has a linear expansion coefficient different from the linear expansion coefficient of the probe substrate to restrict thermal expansion of the probe substrate, and makes up a complex with the probe substrate. When the test target is at two measurement temperatures (T1, T′1) and if the complex is at arrival temperatures (T2, T′2), it is set that the variations of expansion of the test target and the complex at the temperature differences (T1-T2, T′1-T′2) between each measurement temperature and a corresponding arrival temperature be almost at the same level. |
