| 摘要 |
<p>The present invention relates to an oven for manufacturing a wafer to dry multiple wafers. An oven for manufacturing a wafer according to the present invention includes: an oven body (100); a magazine (200) which is horizontally separated with a constant distance from a vertical bar (210) fixed to the upper surface of the oven body to stack the wafers with a constant distance and is combined with multiple wafer stages (220) which independently rotates around the vertical bar; an elevator (300) installed at the oven body; an elevating member (400) which forms a sealing space for isolating the magazine from the outside and moves up and down from the upper surface of the oven body through the elevator; and a heater (500) which provides hot air to the magazine through the upper surface of the oven body.</p> |
