APPARATUS AND METHOD FOR POWER MONITORING OF VERTICAL DIFFUSION FURNACE

摘要

An apparatus for monitoring electricity of a vertical diffusion furnace according to the disclosed present invention is an apparatus for monitoring electricity supplied to a heater installed in a vertical diffusion furnace used in a semiconductor diffusion process, and includes: a heater blocking unit (120) for supplying electricity to a heater (140) by receiving electricity from a power supply part (110); a silicon controlled rectifier device (SCR, 130) which has an anode port, a cathode port and a gate port as having the anode port connected to the heater blocking unit (120) and the cathode port connected to the heater (140); and an SCR monitoring unit (200) which judges fault of the silicon controlled rectifier device (130) by sensing and analyzing a signal inputted to the gate of the silicon controlled rectifier device (130) and a cathode output signal applied to the heater. By this, the apparatus can prevent fault of a product and fire danger caused by short-circuit and disconnection of the silicon controlled rectifier device in advance, and also, can diagnose abnormality by monitoring an operation state of the silicon controlled rectifier device in real-time by stopping the operation of the equipment and then not connecting an additional diagnosis apparatus.