| 摘要 |
<p>An embodiment of the present invention provides a device which processes a substrate with a liquid and a method thereof. A substrate processing device comprises; a housing which provides a processing space in the inner side; a spin head which is located in the housing and supports and rotates the substrate; and a spraying unit which sprays a liquid medicine to the substrate which is supported on the spin head. The spraying unit comprises; a first nozzle member which sprays the liquid medicine to the substrate; and a second nozzle member which sprays the liquid medicine to the substrate. The second nozzle member comprises a nozzle having a body wherein a longitudinal direction is parallel to the spin head. The first nozzle member forms a liquid film on the substrate while a slit nozzle is moved to a processing position. Therefore, it is prevented that the substrate is dried.</p> |
