POLYCRYSTALLINE ALLOY HAVING GLASS FORMING ABILITY, METHOD OF FABRICATING THE SAME, ALLOY TARGET FOR SPUTTERING AND METHOD OF FABRICATING THE SAME

摘要

The purpose of the present invention is to provide a crystalline alloy which has glass forming ability and is remarkably excellent in thermal stability, as compared to an amorphous alloy, and to provide a manufacturing method thereof. Also, another purpose of the present invention is to provide an alloy target for sputtering manufactured of the crystalline alloy and a manufacturing method thereof. According to an aspect of the present invention, the crystalline alloy with glass forming ability, which is formed of at least three elements with glass forming ability, has a crystal grain average size of 0.1 to 5μm and includes 5-20 element% of Al, 15-40 element% of one selected from Cu and Ni, at least one selected from P and S, and remainder consisting of Zr.