发明名称 LINEAR SOURCE AND EVAPORATION METHOD USING THE SAME
摘要 A linear evaporating source used in a deposition process of the present invention comprises a material receiving unit receiving a material to be deposited, a main heater provided on an outer surface of the material receiving unit and heating the material, and a control heater provided within the material receiving unit and evenly heating the material.
申请公布号 KR20140144458(A) 申请公布日期 2014.12.19
申请号 KR20130066414 申请日期 2013.06.11
申请人 JMON CO., LTD. 发明人 YOON, JONG MAN;CHO, YOU SUK;KANG, YOUNG JIN;SONG, HYE JIN
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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