发明名称 |
LINEAR SOURCE AND EVAPORATION METHOD USING THE SAME |
摘要 |
A linear evaporating source used in a deposition process of the present invention comprises a material receiving unit receiving a material to be deposited, a main heater provided on an outer surface of the material receiving unit and heating the material, and a control heater provided within the material receiving unit and evenly heating the material. |
申请公布号 |
KR20140144458(A) |
申请公布日期 |
2014.12.19 |
申请号 |
KR20130066414 |
申请日期 |
2013.06.11 |
申请人 |
JMON CO., LTD. |
发明人 |
YOON, JONG MAN;CHO, YOU SUK;KANG, YOUNG JIN;SONG, HYE JIN |
分类号 |
H01L51/56;H05B33/10 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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