发明名称 半導体装置の製造方法
摘要 <p>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device capable of suppressing connection failure between a wiring sheet and a semiconductor chip, and improving adhesion between a sealing sheet and a wiring sheet.SOLUTION: A method of manufacturing a semiconductor device includes a step A for preparing a laminate in which at least a temporary fitting sheet and a wiring sheet where re-wiring layer is formed are stacked, a step B for flip-chip mounting a semiconductor chip on the wiring sheet of the laminate, a step C for preparing a sealing sheet provided by plastic-processing a kneaded object obtained by kneading epoxy resin, curing agent, and inorganic filler agent, a step D in which the sealing sheet is arranged on a surface on the side where the semiconductor chip appears and the semiconductor chip is embedded in the sealing sheet, a step E for thermally curing the sealing sheet, and a step F for peeling the temporary fitting sheet from the wiring sheet.</p>
申请公布号 JP2014239154(A) 申请公布日期 2014.12.18
申请号 JP20130121004 申请日期 2013.06.07
申请人 NITTO DENKO CORP 发明人 TOYODA HIDESHI ; KAMEYAMA KOJIRO ; MATSUMURA TAKESHI ; ODA TAKASHI
分类号 H01L21/56;H01L21/60 主分类号 H01L21/56
代理机构 代理人
主权项
地址