TRANSISTOR HAVING ALL-AROUND SOURCE/DRAIN METAL CONTACT CHANNEL STRESSOR AND METHOD TO FABRICATE SAME

摘要

An intermediate transistor structure includes a fin structure disposed on a surface of an insulating layer. The fin structure has a gate structure disposed thereon between first and second ends of the fin structure. A first portion of the fin structure is a first doped portion that is disposed over a first recess in the surface of the insulating layer and a second portion of the fin structure is a second doped portion disposed over a second recess in the surface of the insulating layer. The intermediate transistor structure further includes source and drain metal disposed around the first and second doped portions, each inducing one of compression strain or tensile strain in a portion of the fin structure that is disposed within the gate structure and that functions during operation of the transistor as a channel of the transistor.

主权项

1. An intermediate transistor structure, comprising:
an elongated fin structure disposed on a surface of an insulating layer, the fin structure having agate structure disposed thereon at a location along a length of the fin structure between a first end of the fin structure and a second end of the fin structure, a first portion of the fin structure being a first doped portion disposed over a first recess in the surface of the insulating layer and being proximate to a first side of the gate structure and a second portion of the fin structure being a second doped portion disposed over a second recess in the surface of the insulating layer and being proximate to a second side of the gate structure; and source metal disposed around the first doped portion of the fin structure within the first recess and drain metal disposed around the second doped portion of the fin structure within the second recess, the source metal and the drain metal each inducing a radially directed strain force into the fin structure that transfers to a laterally directed strain force along the length of the fin structure, where the laterally directed strain force induces one of compression strain or tensile strain in a portion of the fin structure that is disposed within the gate structure and that functions during operation of the transistor, as a channel of the transistor.