发明名称 ELECTRONIC COMPONENT PRESSING DEVICE, ELECTRONIC COMPONENT PRESSING UNIT, ELECTRONIC COMPONENT CONVEYANCE DEVICE AND ELECTRONIC COMPONENT INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an electronic component pressing device, an electronic component pressing unit, an electronic component conveyance device and an electronic component inspection device which make it possible to control the temperature of an electronic component with high accuracy.SOLUTION: A first hand unit 1 includes a base 911, a heat exchange part 912 capable of heat exchange with an IC device 100, a heat sink 914 disposed between the base 911 and the heat exchange part 912 and thermally connected to the heat exchange part 912, an injection nozzle 916 for jetting cooling gas G to the heat sink 914, and a heater 913 that heats the IC device 100.
申请公布号 JP2014238378(A) 申请公布日期 2014.12.18
申请号 JP20130122213 申请日期 2013.06.10
申请人 SEIKO EPSON CORP 发明人 NAKAMURA SATOSHI;SHIMOJIMA SOKO;TERAJIMA SEIJI
分类号 G01R31/26 主分类号 G01R31/26
代理机构 代理人
主权项
地址