发明名称 MEASUREMENT DEVICE, CALCULATION DEVICE, AND MEASUREMENT METHOD FOR INSPECTED OBJECT, AND METHOD FOR MANUFACTURING ARTICLES
摘要 PROBLEM TO BE SOLVED: To provide a measurement device capable of detecting an edge of an inspected object with high accuracy.SOLUTION: A measurement device 10 that measures an inspected object 170 comprises: a two-dimensional measurement unit 130 that takes an image of the inspected object 170 and outputs two-dimensional image data; a three-dimensional measurement unit 120 that applies a three-dimensional measurement to the inspected object 170 and outputs three-dimensional data; and a calculation unit 108 that detects a temporal edge of the inspected object 170 using the three-dimensional data, sets an edge detection range in the two-dimensional image using the detected temporal edge, and calculates shape information of the inspected object 170 by detecting an edge of the inspected object 170 in the edge detection range using the two-dimensional image data.
申请公布号 JP2014238298(A) 申请公布日期 2014.12.18
申请号 JP20130120158 申请日期 2013.06.06
申请人 CANON INC 发明人 UEMURA TAKANORI
分类号 G01B11/24;G01B11/02 主分类号 G01B11/24
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