| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of improving a thin-film growth speed.SOLUTION: A method of growing a thin film includes a process of growing the thin film by conformally forming at least one layer on a substrate having a structure extending from a top surface, one conformal layer or respective conformal layers being formed on the top surface of the substrate and on the structure extending from the top surface. The thickness of the one conformal layer or the total of thicknesses of the plurality of conformal layers is at least a half as large as an average interval of the structure. At least one of the length of the structure, the average interval of the structure, and a minimum size of the structure is so designed as to increase a growth speed of the one conformal layer or the respective conformal layers. |
