| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner which reduces the generation of non-linear linear vibration even if driven at a high resonant frequency, reduces stress, and can prevent the deformation of a mirror.SOLUTION: An optical scanner has: a mirror 10; a mirror support part 20; a torsion beam 30 which supports the mirror support part from both sides in the axial direction, and torsionally oscillates the mirror support part 20 around an axis; a movable frame which surrounds these items; a first drive beam 50 which is connected and supported to inside walls of the movable frame 60 at its one-side end, and generates a drive force for driving the mirror support part 20 in a first direction; and a connecting beam 40 which connects the other end of the first drive beam 50 and the torsion beam 30, and transmits the drive force to the torsion beam 30. A flat face shape of the first drive beam 50 has an inwardly-recessed curved shape portion in a position being at the movable frame 60 side of a side which connects the movable frame 60 and the connecting beam 40, and not reaching the movable frame 60. |
