发明名称 |
HEMISPHERICAL SCANNING OPTICAL SCATTEROMETER |
摘要 |
<p>A hemispherical scanning optical scatteronieter and method for its use for measuring scattered radiation, with a reflected scatter measurement laser, and/or a transmitted scatter measurement laser, an array of optical detectors, a computer controlled system to rotate the array of optical detectors, an electronic system, a computer interface and a computer for processing the signal.</p> |
申请公布号 |
WO2014200957(A1) |
申请公布日期 |
2014.12.18 |
申请号 |
WO2014US41624 |
申请日期 |
2014.06.10 |
申请人 |
SCATTERMASTER LLC;HEGSTROM, ERIC;STOVER, JOHN |
发明人 |
HEGSTROM, ERIC;STOVER, JOHN |
分类号 |
G01N21/47 |
主分类号 |
G01N21/47 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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