| 摘要 |
<p>The present invention relates to a XY theta stage. The present invention provides a XY theta stage comprising a base; a XY stage configured to transfer a work piece; a plurality of transfer units provided on the base and laminated in a direction that a LM guide of X-axis is orthogonal to a LM guide of Y-axis to transfer the XY stage along X-axis and Y-axis; a X-axis driving unit connected to any one of the plurality of transfer units to transfer the XY stage along X-axis; a Y-axis driving unit disposed in a direction orthogonal to the X-axis driving unit and connected to another one of the plurality of transfer units to transfer the XY stage along Y-axis; aθstage provided on the XY stage to rotate the work piece alongθ-axis; and aθ-axis driving unit connected through the XY stage and located beneath theθstage to rotate theθstage. According to the present invention, a rotation angle can be easily calculated by using a DD motor (direct drive motor) as aθ-axis driving motor, and 360 degree rotation and a precious position control can be allowed when the stage is rotated. Further, the DD motor is inserted inside a main body, and a gravity center is lowered as much as possible compared to an existing stage. Moreover, the size is reduced, and a stroke is prolonged. Further, an easy control is allowed by using an individual driving mode not synchronous driving mode between motors and ultrahigh speed 360 degree rotation is achieved by rotation alongθ-axis using the DD motor inserted in the main body.</p> |
