发明名称 |
APPARATUS METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES |
摘要 |
<p>An apparatus and method for liquid treatment of wafer-shaped articles comprises a process unit comprising a chuck for holding a wafer-shaped article in a predetermined orientation, and a liquid recovery system that receives used process liquid recovered from the process unit. The liquid recovery system supplies process liquid to a dispenser in the process unit. A supply of fresh process liquid supplies fresh process liquid to the liquid recovery system and also supplies fresh process liquid to a dispenser in the process unit while bypassing the liquid recovery system.</p> |
申请公布号 |
KR20140144199(A) |
申请公布日期 |
2014.12.18 |
申请号 |
KR20147027399 |
申请日期 |
2013.03.20 |
申请人 |
LAM RESEARCH AG |
发明人 |
GANSTER MICHAEL;ZAGORZ PHILIPP;GOLLER ALOIS |
分类号 |
H01L21/02;B05C5/02;B05C21/00;B08B3/10;B08B3/14;H01L21/30;H01L21/306 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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