| 摘要 |
PROBLEM TO BE SOLVED: To achieve calibration canceling errors due to a cable floating capacitance or the like and to enable highly accurate measurement of a minor electrostatic capacitance of a sensor panel in an inspection apparatus for inspecting an inspection target such as the sensor panel.SOLUTION: In a state in which a sensor panel is detached, a calibration unit 46 of a sensor panel inspection apparatus 1 adjusts, in a calibration signal unit 42, a voltage and a phase of an alternating-current power supply corresponding to an ammeter so that an output from the ammeter of a current detection unit 41 electrically connected to a first cable 36 is equal to zero while supplying an alternating-current signal of a signal unit 11 to at least any one of a plurality of second cables 37. When the output from the ammeter is equal to zero, the voltage and the phase of the alternating-current power supply at that time are stored. At a time of inspecting the sensor panel, an alternating-current signal is generated in an alternating-current power supply of the calibration signal unit 42 on the basis of the stored voltage and phase. |
