发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which has a structure which allows easy manufacturing even though it is miniaturized and which can inhibit deterioration in electrical characteristics associated with miniaturization; and provide a manufacturing method of the semiconductor device.SOLUTION: A semiconductor device has a structure in which a source electrode layer and a drain electrode layer are formed on a top face of an oxide semiconductor layer in which: a lateral face of the oxide semiconductor layer and a lateral face of the source electrode layer are flush with each other; and the lateral face of the oxide semiconductor layer and the lateral face of the source electrode layer and first wiring are electrically connected with each other by a side contact; and the lateral face of the oxide semiconductor layer and a lateral face of the drain electrode layer are flush with each other; and the lateral face of the oxide semiconductor layer and the lateral face of the drain electrode layer and second wiring are electrically connected with each other by a side contact.
申请公布号 JP2014239213(A) 申请公布日期 2014.12.18
申请号 JP20140097276 申请日期 2014.05.09
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 HANAOKA KAZUYA
分类号 H01L29/786;H01L21/28;H01L21/336;H01L29/41 主分类号 H01L29/786
代理机构 代理人
主权项
地址