发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which has a structure which allows easy manufacturing even though it is miniaturized and which can inhibit deterioration in electrical characteristics associated with miniaturization; and provide a manufacturing method of the semiconductor device.SOLUTION: A semiconductor device has a structure in which a source electrode layer and a drain electrode layer are formed on a top face of an oxide semiconductor layer in which: a lateral face of the oxide semiconductor layer and a lateral face of the source electrode layer are flush with each other; and the lateral face of the oxide semiconductor layer and the lateral face of the source electrode layer and first wiring are electrically connected with each other by a side contact; and the lateral face of the oxide semiconductor layer and a lateral face of the drain electrode layer are flush with each other; and the lateral face of the oxide semiconductor layer and the lateral face of the drain electrode layer and second wiring are electrically connected with each other by a side contact. |
申请公布号 |
JP2014239213(A) |
申请公布日期 |
2014.12.18 |
申请号 |
JP20140097276 |
申请日期 |
2014.05.09 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
HANAOKA KAZUYA |
分类号 |
H01L29/786;H01L21/28;H01L21/336;H01L29/41 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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