THERMAL TYPE PHOTODETECTOR, THERMAL TYPE PHOTODETECTOR DEVICE, ELECTRONIC INSTRUMENT, AND METHOD OF MANUFACTURING THERMAL TYPE PHOTODETECGTOR

摘要

A thermal detector includes a substrate, a thermal detector element, a support member, a support post and an auxiliary support post. The support member supports the thermal detector element. The support post is disposed between the substrate and the support member so that a cavity is disposed between the substrate and the support member. The auxiliary support post is disposed between the substrate and the support member. A gap is disposed between the auxiliary support post and the support member.

主权项

1. A thermal detector comprising:
a substrate; a thermal detector element; a support member supporting the thermal detector element; a support post disposed between the substrate and the support member so that a cavity is disposed between the substrate and the support member; and an auxiliary support post disposed between the substrate and the support member, a gap being disposed between the auxiliary support post and the support member.