| 摘要 |
A process for forming an amorphous conductive oxide film, comprising the steps of: applying a composition which comprises (A1) a×y parts by mole of at least one metal compound selected from the group consisting of carboxylate salts, alkoxides, diketonates, nitrate salts and halides of a metal selected from among lanthanoids (excluding cerium), (A2) a×(1−y) parts by mole of at least one metal compound selected from the group consisting of carboxylate salts, alkoxides, diketonates, nitrate salts and halides of a metal selected from among lead, bismuth, nickel, palladium, copper and silver, (B) 1 part by mole of at least one metal compound selected from the group consisting of carboxylate salts, alkoxides, diketonates, nitrate salts, halides, nitrosylcarboxylate salts, nitrosylnitrate salts, nitrosylsulfate salts and nitrosylhalides of a metal selected from among ruthenium, iridium, rhodium and cobalt, and (C) a solvent containing at least one selected from the group consisting of carboxylic acids, alcohols, ketones, diols and glycol ethers to a substrate to form a coating film; and heating the coating film in an oxidizing atmosphere. |
| 主权项 |
1. A process for producing an amorphous conductive oxide film, the process comprising:
applying a composition to a substrate, thereby forming a coating film, and first heating the coating film in an oxidizing atmosphere, wherein the composition comprises: (A1) a×y parts by mole of at least one first metal compound selected from the group consisting of a metal carboxylate salt, a metal alkoxide, a metal diketonate, a metal nitrate salt, and a metal halide, wherein a metal of the at least one first metal compound is a lanthanoid excluding cerium, (A2) a×(1−y) parts by mole of at least one second metal compound selected from the group consisting of a metal carboxylate salt, a metal alkoxide, a metal diketonate, a metal nitrate salt, and a metal halide, wherein a metal of the at least one second metal compound is lead, bismuth, nickel, palladium, copper, or silver; (B) 1 part by mole of at least one third metal compound selected from the group consisting of a metal carboxylate salt, a metal alkoxide, a metal diketonate, a metal nitrate salt, a metal halide, a metal nitrosylcarboxylate salt, a metal nitrosylnitrate salt, a metal nitrosylsulfate salt and a metal nitrosylhalide, wherein a metal of the at least one third metal compound is ruthenium, iridium, rhodium, or cobalt; and (C) a solvent comprising at least one selected from the group consisting of a carboxylic acid, an alcohol, a ketone, a diol and a glycol ether, and wherein at least one of the at least one first, second, and third metal compounds is selected from the group consisting of the metal carboxylate salt, the metal alkoxide, the metal diketonate, and the metal nitrosylcarboxylate salt;
a is a number of 0.3 to 6.0; andy is a number of 0 or more and less than 1. |
