METHOD FOR DETERMINING WAVE-FRONT ABERRATION DATA OF A TO-BE-TESTED OPTICAL SYSTEM

摘要

The invention concerns a method for determining wave-front aberration data of a to-be-tested optical system comprising the steps of: a) providing a wave-front sensing image of light received from the tested optical system; b) providing a model representative of the optical system with at least an optical parameter representative of said model c) optimizing a set of wave-front coefficient data and said at least optical parameter of said model according to a merit function wherein the calculation of said merit function comprises the steps of : -generating a wave-front sensing modeled image of light received from said model by means of said at least optical parameter and said set of wave-front coefficient data; -calculating a criteria based on shape parameter data of the wave-front sensing image and shape parameter data of the wave-front sensing modeled image, so as to obtain wave-front aberration data of the tested optical system.