| 摘要 |
PROBLEM TO BE SOLVED: To provide a radio frequency (RF) generator capable of controlling frequencies and phases of a plurality of RF power supply apparatuses.SOLUTION: A system includes a first RF generator 812a and a second RF generator 812b. The first RF generator 812a controls a frequency of the second RF generator 812b. The first RF generator 812a includes a RF power source 840a, a RF sensor 844a, and a sensor signal processing unit 842a. The sensor signal processing unit 842a is coupled to the RF power source 840a and the RF sensor 844a. The sensor signal processing unit 842a scales a frequency of the first RF generator 812a to control the frequency of the second RF generator 812b. |
