SEMICONDUCTOR DEVICE, LIQUID CRYSTAL DISPLAY DEVICE HAVING SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrode layer that is not separated from an oxide semiconductor and oxide insulating film, and prevents the dispersion of the oxide semiconductor or copper atoms in the oxide semiconductor, and the withdrawal of oxygen from the oxide semiconductor.SOLUTION: An oxygen diffusion preventing thin film 37 in contact with an oxide semiconductor layer 34 includes copper as a main component, contains copper oxide to reduce the difference in the concentration of oxygen on the interface between the oxide semiconductor layer 34 and the oxygen diffusion preventing thin film 37, and forms a high conductivity thin film 38 that contains copper and has low resistance on the oxygen diffusion preventing thin film 37 to constitute a laminated electrode layer. Since the high conductivity thin film 38 having the high content of copper does not come into direct contact with the oxide semiconductor layer 34, the diffusion of copper and withdrawal of oxygen do not occur.