LOAD PORT MODULE

摘要

A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.

主权项

1. A substrate loading device comprising:
a frame adapted for connecting the device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the device and processing apparatus; and a substrate transport container support connected to the frame for holding at least one substrate transport container, the substrate transport container support comprising
a cover covering at least a portion of the substrate transport container support on which portion the at least one substrate transport container is seated, the cover having a resiliently flexible section,at least one detector for detecting a presence of the at least one substrate transport container on the substrate transport container support, anda member connected to the resiliently flexible section of the cover to move as a unit with the resiliently flexible section, wherein the member cooperates with the at least one detector causing the at least one detector to detect the presence of the at least one substrate transport container on the substrate transport container support.