| 摘要 |
[Problem] To provide a structure of an ashing apparatus that is provided with a processing chamber having a subject to be processed disposed therein, and a lamp chamber that is provided with an ultraviolet lamp that radiates ultraviolet to the subject to be processed, said structure being capable of accurately managing the irradiation distance between the light source and the subject to be processed, and being capable of reliably transferring the subject to be processed, thereby efficiently removing a smear on a wiring board. [Solution] The present invention is characterized in that: the processing chamber and the lamp chamber are to be relatively moved in parallel with respect to a surface of the subject to be processed, said surface being to be processed; the processing chamber is provided with a stage that supports the subject to be processed, a gas supply opening through which a processing gas is supplied to the inside of the processing chamber, and a gas discharge opening through which the processing gas is discharged; and an ultraviolet transmitting window member that partitions the processing chamber and the lamp chamber from each other is fixed to the processing chamber. |
