POLISHING LIQUID FOR METAL AND POLISHING METHOD

摘要

The present invention relates to a metal polishing liquid for polishing at least a part of metal in a substrate having the metal, comprising, component A: a metal solubilizer containing amino acids, component B: compounds having the benzotriazole skeleton, and component C: an acrylic acid polymer having the weight average molecular weight of 10,000 or more, and having the mass ratio between the component B and the component C, (component B:component C), to be 1:1 to 1:5. Use of the metal polishing liquid can simultaneously yield high polishing rates and low etching rates at higher level, enabling to form an embedded pattern with higher reliability.

主权项

1. A metal polishing liquid for polishing at least a part of metal in a substrate having the metal, comprising
component A: a metal solubilizer containing an amino acid; component B: a compound having the benzotriazole skeleton; and component C: an acrylic acid polymer having the weight average molecular weight of 10,000 or more, wherein the mass ratio between the component B and the component C, (component B:component C), is 1:1 to 1:5.