| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an apparatus and a method for optical element measurement, capable of maintaining high accuracy measurement of a position of an optical functional surface and the like by suppressing the occurrence of strains in an optical element and reliably holding and fixing the optical element in measurement even if the optical element is for example deformable and small.SOLUTION: Measurement of an optical element OE using an optical element measurement apparatus 100 includes fixing the optical element OE by an energization part 72, and at this time attracting the energization part 72 to thereby avoid direct application of load onto the optical element OE while maintaining a firm fixation state. This does not cause the optical element OE to be directly attracted from, for example, a central side where the optical functional surface is formed. Thus, even if a lens is thin and deformable by an attracting force or the like, accurate measurement is allowed without generating strains, etc. in measurement.</p> |
