RELIABLE ELECTRICAL FUSE WITH LOCALIZED PROGRAMMING AND METHOD OF MAKING THE SAME

摘要

An electrical fuse has an anode contact on a surface of a semiconductor substrate. The electrical fuse has a cathode contact on the surface of the semiconductor substrate spaced from the anode contact. The electrical fuse has a link within the substrate electrically interconnecting the anode contact and the cathode contact. The link comprises a semiconductor layer and a silicide layer. The silicide layer extends beyond the anode contact. An opposite end of the silicide layer extends beyond the cathode contact. A silicon germanium region is embedded in the semiconductor layer under the silicide layer, between the anode contact and the cathode contact.

主权项

1. A method for making an electrical fuse, the method comprising the steps of:
dividing a silicon substrate into a first region, a second region adjacent to the first region, and a third region adjacent to the second region, using shallow trench isolation; creating a first recess in the first region and a second recess in the second region, using reactive ion etching; growing silicon germanium in the first recess and the second recess; forming silicide in the first region, above the silicon germanium grown in the first recess; and forming an anode contact and a cathode contact in the first region adjoining the silicide.