| 摘要 |
PROBLEM TO BE SOLVED: To provide a supercritical treatment apparatus which can always, surely and stably reverse supercritical carbon dioxide gas to efficiently prevent breakage of a pump without causing defective heat removal or defective lubrication.SOLUTION: A supercritical treatment apparatus comprises: a treatment container in which any one of cleaning, dehydration, reaction, function added processing, and osmosis treatment is performed using supercritical carbon dioxide gas; a supercritical carbon dioxide gas supply device in which low pressure carbon dioxide gas from a low pressure carbon dioxide gas storage tank of 1-7 MPa becomes supercritical carbon dioxide gas at the supercritical generation unit to charge the supercritical carbon dioxide gas into the treatment container; a discharger by which the supercritical carbon dioxide gas is discharged from the treatment container; a circulation line in which a canned motor pump is interposed to circulate the supercritical carbon dioxide gas charged in the treatment container; and a reverse line which is arranged at the canned motor pump in the circulation line, and in which the carbon dioxide gas not in a supercritical state is discharged into atmosphere, or the carbon dioxide gas is reversed into the low pressure carbon dioxide gas storage tank of the supercritical carbon dioxide gas supply device. |
