| 发明名称 |
TURBOMOLECULAR PUMP |
| 摘要 |
A turbomolecular pump has a rotor element in a housing. The rotor element is arranged on a rotor shaft. The rotor shaft is supported by two bearing elements in the housing. The bearing element on the high-vacuum side is constructed as a roller bearing. In order to guarantee a pressure in the area of the bearing element that is acceptable for the bearing element constructed as a roller bearing, the bearing element is arranged in a chamber. The chamber is connected via a channel to the pre-vacuum area and sealed relative to the high-vacuum area by a gasket. |
| 申请公布号 |
US2014369809(A1) |
申请公布日期 |
2014.12.18 |
| 申请号 |
US201314372338 |
申请日期 |
2013.01.08 |
| 申请人 |
Oerlikon Leybold Vacuum Gmbh |
发明人 |
Beyer Christian;Dietz Holger;Walter Gerhard Wilhelm |
| 分类号 |
F04D19/04;F04D29/08;F04D29/046 |
主分类号 |
F04D19/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A turbomolecular pump comprising
at least one rotor element with a plurality of rotor blades, said element being supported in a housing by means of a rotor element, at least one stator element comprising a plurality of stator blades projecting between the rotor blades, and at least two bearing elements arranged in end areas of the rotor shaft, wherein at least the bearing element on the high-vacuum side is formed as a roller bearing and is arranged in a chamber that is connected via at least one channel to a pressure area in which a higher pressure prevails than in the high-vacuum area. |
| 地址 |
Koeln DE |
