| 摘要 |
<p>The present invention relates to a Z-axis stage using a DD motor. The present invention provides a Z-axis stage using a DD motor comprising a base; a housing provided on the base; a motor unit provided within the housing to generate a rotation force; a ball screw connected to a central portion of the motor unit passing through the central portion and configured to rotate according to the rotation of the motor unit and convert rotation movement to rectilinear movement; a bearing provided in the base and connected to a bottom of the ball screw; and a Z-axis stage configured to move upward and downward over the housing according to the rotation of the ball screw. According to the present invention, the DD motor is provided within the housing and the ball screw provided in the center of the DD motor transfers directly power to move the Z-axis stage upward and downward, thereby minimizing a space required to construct equipment and delivering a high weight work piece using high torque of the DD motor. Further, backlash can be minimized using the DD motor to allow a precious position control. Further, the Z-axis stage is upward and downward moved along a LM guide to allow a stable and precious delivery. Further, a distance value that the Z-axis stage is upward and downward moved is calculated using an encoder to allow an extremely sensitive position control. Further, by using the DD motor, the constitution for transferring power to move the Z-axis stage upward and downward is simplified without unnecessary components, thereby minimizing a cumulative error for assembly and providing best precision for the equipment.</p> |
