MEASURING APPARATUS AND SPECIMEN INFORMATION OBTAINING SYSTEM

摘要

A measurement apparatus includes a first light source unit configured to emit a first light having a first wavelength, and a scanning unit configured to move an irradiation position of the first light with respect to a specimen, so as to scan the specimen with the first light. The first light source unit includes a wavelength changing unit configured to change the first wavelength. Movement of the irradiation position is performed by the scanning unit while the wavelength changing unit is changing the first wavelength. A changing cycle of the first wavelength by the wavelength changing unit is shorter than a position moving cycle by the scanning unit.

主权项

1. A measurement apparatus, comprising:
a first light source unit configured to emit a first light having a first wavelength; and a scanning unit configured to move an irradiation position of the first light with respect to a specimen, so as to scan the specimen with the first light; wherein the first light source unit includes
a wavelength changing unit configured to change the first wavelength; wherein movement of the irradiation position with respect to the specimen is performed by the scanning unit while the wavelength changing unit is changing the first wavelength; and wherein a changing cycle of the first wavelength by the wavelength changing unit is shorter than a position moving cycle by the scanning unit.