MEASURING APPARATUS, MEASURING METHOD, AND PROCESSING APPARATUS

摘要

A measuring apparatus for performing detection of a signal varying with displacement of an object and measurement of the displacement, includes a clock generator configured to generate, in synchronization with a request signal for requesting measurement data, a first clock signal having a cycle shorter than a cycle of the request signal; a detector configured to perform the detection with respect to each cycle of the first clock signal; an operation device configured to obtain the measurement data based on an output of the detector; and a correction device configured to obtain a displacement amount of the object per unit time based on a plurality of the measurement data, and correct the measurement data based on the obtained displacement amount and a time difference between the first clock signal relating to the measurement data and the first clock signal relating to the request signal.

主权项

1. A measuring apparatus for performing detection of a signal which varies with displacement of an object and measurement of the displacement, the apparatus comprising:
a clock generator configured to generate, in synchronization with a request signal for requesting measurement data, a first clock signal having a cycle shorter than a cycle of the request signal; a detector configured to perform the detection with respect to each cycle of the first clock signal; an operation device configured to obtain the measurement data based on an output of the detector; and a correction device configured to obtain a displacement amount of the object per unit time based on a plurality of the measurement data from the operation device, and to correct the measurement data based on the obtained displacement amount and a time difference between the first clock signal relating to the measurement data and the first clock signal relating to the request signal.