发明名称 |
MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM |
摘要 |
A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction. |
申请公布号 |
US2014366631(A1) |
申请公布日期 |
2014.12.18 |
申请号 |
US201414472143 |
申请日期 |
2014.08.28 |
申请人 |
InvenSense, Inc. |
发明人 |
SEEGER Joseph;ANAC Ozan |
分类号 |
G01C19/5733 |
主分类号 |
G01C19/5733 |
代理机构 |
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代理人 |
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主权项 |
1. A gyroscope comprising;
a substrate; a guided mass system, the guided mass system comprising at least one proof-mass and at least one guiding arm; the at least one proof-mass being coupled to the at least one guiding arm; the at least one guiding arm being coupled to the substrate through at least one flexible member; wherein the proof-mass vibrates in a first direction and the guiding arm rotates; wherein the at least one guiding arm and the at least one proof-mass are able to rotate about a first sense axis in response to angular velocity about a first input axis; an actuator for vibrating the at least one proof-mass in the first direction; and a transducer for generating an output in response to the angular velocity of the at least one proof-mass. |
地址 |
San Jose CA US |