T-SHAPED COMPOUND SEMICONDUCTOR LATERAL BIPOLAR TRANSISTOR ON SEMICONDUCTOR-ON-INSULATOR

摘要

A base region extends upward from a recessed semiconductor surface of a semiconductor material portion present on an insulator. The base region includes a vertical stack of, an extrinsic base region and an intrinsic base region. The extrinsic base region includes a first compound semiconductor material portion of a first conductivity type and a first dopant concentration. The intrinsic base region includes another first compound semiconductor material portion of the first conductivity type and a second dopant concentration which is less than the first dopant concentration. A collector region including a second compound semiconductor material portion of a second conductivity type opposite of the first conductivity type is located on one side on the base region. An emitter region including another second compound semiconductor material portion of the second conductivity type is located on another side on the base region.

主权项

1. A semiconductor structure comprising:
at least one semiconductor material portion located on a surface of a buried insulator layer; a base region extending upward from a recessed semiconductor surface of said at least one semiconductor material portion, wherein said base region comprises a vertical stack of, from bottom to top, an extrinsic base region and an intrinsic base region, said extrinsic base region comprising a first compound semiconductor material portion of a first conductivity type and a first dopant concentration and said intrinsic base region comprising another first compound semiconductor material portion of the first conductivity type and a second dopant concentration, wherein said second dopant concentration is less than the first dopant concentration; a collector region comprising a second compound semiconductor material portion of a second conductivity type which is opposite of the first conductivity type is located on one side on the base region and in direct contact with a sidewall surface of said intrinsic base region; and an emitter region comprising another second compound semiconductor material portion of said second conductivity type which is opposite of the first conductivity type is located on another side on the base region and in direct contact with another sidewall surface of said intrinsic base region.