发明名称 NANOGENERATOR AND METHOD FOR FABRICATING THE SAME
摘要 <p>The present invention relates to a nano-generator to generate power by using a piezoelectric material of nano-structure, and a method for fabricating the same. A nano-generator according to the present invention includes: a lower substrate, a lower electrode prepared on the lower substrate, piezoelectric material nano-rods which have lower ends fixed to the lower electrode and vertically arranged on the lower electrode, an upper substrate which are vertically and movably installed on the piezoelectric material nano-rods, a protrusion layer which is combined with the lower surface of the upper substrate and includes protrusions, and an upper electrode which is stacked on the protrusion layer and has recess parts which put pressure on the upper end of the piezoelectric material nano-rod when the upper substrate approaches the lower substrate, and bends the piezoelectric material nano-rods.</p>
申请公布号 KR101474164(B1) 申请公布日期 2014.12.17
申请号 KR20130126489 申请日期 2013.10.23
申请人 UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY 发明人 YU, JAE SU;KO, YEONG HWAN
分类号 H01L41/047;H01L41/22;H02N3/00 主分类号 H01L41/047
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