| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storage container such that a substrate can be easily attached to and detached from the container without contaminating a surface and an edge portion of the substrate, and to provide a carrying container for carrying the container. SOLUTION: The substrate storage container 50 includes a pair of plate bodies 1 which can form a hollow portion 13 by being arranged having their peripheral edges opposed to each other, and the lower plate body 11 has a pedestal 14 stuck inside an edge portion of one surface of the substrate to be stored to support and fix the substrate, the pedestal 14 protruding toward the upper plate body 12 disposed opposite as compared with a lower peripheral edge portion 11a of the lower plate body 11. Consequently, a relatively wide gap is formed between the edge portion of the substrate and the lower peripheral edge portion 11a, and a tool is inserted to easily detach the substrate from the pedestal 14 without contaminating the edge portion of the substrate. COPYRIGHT: (C)2011,JPO&INPIT |
