发明名称 OPTICAL ADJUSTABLE MOUNTS WITH ABSOLUTE POSITION FEEDBACK
摘要 Adjustable mounts for optical elements or the like that may include absolute position information feedback. For some embodiments, position data may be generated independent of displacement measurement. Position data feedback may be provided to driver embodiments, such as piezoelectric inertia drivers, by a controller and used to achieve a desired position setting for an adjustable mount.
申请公布号 EP2593826(A4) 申请公布日期 2014.12.17
申请号 EP20110807412 申请日期 2011.07.12
申请人 NEWPORT CORPORATION 发明人 THOMAS, PATRICK, J.;GVERO, DANIEL;DESAILLY, ROGER
分类号 G02B7/04;G02B7/02;G02B7/198;H01L41/09;H02N2/04 主分类号 G02B7/04
代理机构 代理人
主权项
地址