| 摘要 |
A measuring apparatus (100) for performing detection of a signal varying with displacement of an object and measurement of the displacement, includes a clock generator (70) configured to generate, in synchronization with a request signal for requesting measurement data, a first clock signal having a cycle shorter than a cycle of the request signal; a detector (10) configured to perform the detection with respect to each cycle of the first clock signal; an operation device (30) configured to obtain the measurement data based on an output of the detector (10); and a correction device (40) configured to obtain a displacement amount of the object per unit time based on a plurality of the measurement data, and correct the measurement data based on the obtained displacement amount and a time difference between the first clock signal relating to the measurement data and the first clock signal relating to the request signal. |
