| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To keep the consistent function of a galvano mirror by simply monitoring the temperature of a mirror holder of a galvano scanner to reliably prevent any excessive temperature rise. <P>SOLUTION: A temperature monitoring unit in a laser beam machining apparatus has a bar-shaped or probe-shaped X-axis thermal interlocking unit 90<SB POS="POST">X</SB>and Y-axis thermal interlocking unit 90<SB POS="POST">Y</SB>which are arranged in a scanner casing 60 close to an X-axis mirror holder 78<SB POS="POST">X</SB>and a Y-axis mirror holder 78<SB POS="POST">Y</SB>, respectively, so as not to interfere in their rotating (oscillating) motions. The X-axis thermal interlocking unit 90<SB POS="POST">X</SB>(the Y-axis thermal interlocking unit 90<SB POS="POST">Y</SB>) accommodates a thermal switch as a temperature-sensing element deeply inside a cylindrical casing to electrically connect the internal thermal switch to an external control circuit via an electric cable 96<SB POS="POST">X</SB>(96<SB POS="POST">Y</SB>). <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
