新規化合物、その製造方法、この新規化合物を含有する感放射線性組成物及び硬化膜

摘要

A compound having multiple groups represented by general formula (1') which are the same or different. In general formula (1'), R1 and R2 are each independently a C1-6 alkyl group, and n is an integer of 1 to 6.