| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system for supplying cleaning water, capable of preventing the precipitation of silica onto an article to be cleaned upon using concentrated water produced by a reverse osmosis membrane as cleaning water therefor. <P>SOLUTION: The system 1 for supplying cleaning water includes an apparatus 2 for softening water that produces soft water W2 by removing a water-hardener component contained in raw water W1, a reverse osmosis membrane apparatus 3 that produces permeating water W3 and concentrated water W4 by subjecting the soft water W2 produced by the apparatus 2 for softening water to a membrane separation treatment using a reverse osmosis membrane, a concentrated-water supply line L3 for supplying the concentrated water W4 produced by the reverse osmosis membrane apparatus 3 as cleaning water W5 for an article to be cleaned, a permeating water supply line L4 for supplying the permeating water W3 produced by the reverse osmosis membrane apparatus 3 as rinse water W3 for the article to be cleaned, and a pH controller 7 for controlling the pH of the concentrated water W4 at 8 or higher. <P>COPYRIGHT: (C)2011,JPO&INPIT |
