| 摘要 |
The present invention is provided with a plurality of support sections (4) that, at a plurality of locations at the bottom surface side of a body that is to be processed, support the body that is to be processed, which is irradiated from the top side by laser light while the laser light is scanned in a relative manner; the plurality of support sections (4) are configured in a manner so as to be capable of an operation switching between each individually supporting or cancelling the supporting when the line beam laser light (150) is radiating while scanning in a relative manner; the support of the partial region (111) of the body that is to be processed containing the region (110) of laser light irradiation is successively cancelled alongside the relative scanning of the line beam laser light (150); the irradiation by the line beam laser light (150) is completed alongside the motion of the region (110) of irradiation; and the partial region (112) at which the support has been cancelled is successively re-supported, thereby enabling uniform annealing processing without an effect from pushpins, suction grooves, or the like provided to the reverse surface side of the body that is to be processed during laser annealing processing. |
