| 摘要 |
Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. An example MEMS accelerometer (40) includes a housing (44), a proof mass (42) suspended within the housing by at least one torsional flexure (46-52), at least one planar coil (60) on the proof mass that extends on both sides of an axis of rotation of the proof mass, at least one magnet (260, 262) oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass, at least one pole piece (280, 282) located outside the coil, and at least one magnetic flux concentrator (284, 286) located inside the coil opposite the at least one of the at least one pole pieces. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil between the magnetic flux concentrator and the pole piece. |
