| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon carbide removal device and a silicon carbide removal method capable of accurately removing carbon components and silicon components included in a silicon carbide. SOLUTION: A silicon carbide removal method comprises a first step of removing silicon components included in a silicon carbide by supplying a plasmatized fluorine-containing gas into a processing chamber which stores a member of a silicon carbide formation device to which the silicon carbide is attached and a second step of removing the carbon components included in the silicon carbide by supplying a plasmatized oxygen-containing gas into the processing chamber. This method performs the first step and the second step alternately. COPYRIGHT: (C)2012,JPO&INPIT |
