METHOD FOR FILLING RECESSES USING PRE-TREATMENT WITH HYDROCARBON-CONTAINING GAS

摘要

The present invention provides a method for filling the recesses of a substrate with an insulation layer which includes the steps of: (i) exposing the surfaces of the recesses of the substrate to a pre-deposition gas of a reactive state in a reaction space to treat the surface with reactive hydrocarbons generated from the pre-deposition gas including at least one hydrocarbon unit in a molecule without filling the recesses; and (ii) depositing a flowable insulation layer on the surface of the substrate using a different processing gas except the pre-deposition gas to fill the recesses which are treated in the step (i) by plasma reaction.