| 摘要 |
<p>According to the present invention, a MEMS resonant sensor comprises: a micro electro mechanical system (MEMS) part generating an output signal corresponding to the vibration component of a proof mass vibrating between a first driving electrode and a second driving electrode; an automatic gain control (AGC) part generating a comparison voltage by performing an automatic gain control on the output signal; and a bias part receiving a reference voltage, and generating a bias voltage using the reference voltage and the comparison voltage, wherein the first and second driving electrodes are applied with a sinusoidal driving voltage, and the proof mass is applied with the bias voltage. According to the present invention, the MEMS resonant sensor is capable of maintaining the amplitude of the proof mass stably. In addition, the MEMS resonant sensor is capable of reducing the response errors thereof, thereby preventing malfunction caused in an electronic circuit by the response errors of the MEMS resonant sensor.</p> |
