| 摘要 |
PROBLEM TO BE SOLVED: To enable a measurement of a low dew point without deteriorating responsiveness by a simple and compact configuration. SOLUTION: On one end of a heat conductor 17 (a sensor body 13, a cooling block 15, a cooling plate 16), there is attached an electrothermal cooling element (first electrothermal cooling element) 2 for mirror surface cooling. On the other end of the heat conductor 17, there is attached, as an auxiliary cooler, an electrothermal cooling element (second electrothermal cooling element) 18 having a large cooling capacity. A supply current to the first electrothermal cooling element 2 is controlled by a main controller 24, and a supply current to the second electrothermal cooling element 18 is controlled by a sub controller 25. COPYRIGHT: (C)2012,JPO&INPIT |
