Substrate processing sequence in a cartesian robot cluster tool

摘要

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate.

主权项

1. An apparatus for transferring a substrate in a cluster tool, comprising:
a robot assembly that is adapted to position the substrate in a first direction, wherein the robot assembly comprises:
a robot blade having a first end and a substrate receiving surface;a first linkage member that has a first pivot point and a second pivot point;a first gear coupled to the first end of the robot blade and rotationally coupled to the first linkage member at the first pivot point;a second gear that is rotationally coupled to the first gear and is aligned with the second pivot point of the first linkage member;a first motor that is rotationally coupled to the first linkage member, wherein the first motor is adapted to position the substrate receiving surface by rotating the first linkage member and first gear relative to the second gear, wherein the second gear is coupled to a second motor; anda controller that is in communication with the first motor and the second motor to adjust the rotation speed of the first linkage member relative to the second gear during a transfer process; a first motion assembly that is adapted to position the robot assembly in a second direction that is generally perpendicular to the first direction, the first motion assembly comprising:
a slide assembly that comprises a block that is coupled to a linear rail which is oriented in the second direction;a support plate that is coupled to the block and the robot assembly; andan actuator that is adapted to move the support plate ire a position along a length of the linear rail; and a second motion assembly that is adapted to position the robot assembly in a third direction that is generally perpendicular to the second direction.