发明名称 |
Optical device and method of making |
摘要 |
An optical device and method is disclosed for forming the optical device within the wide-bandgap semiconductor substrate. The optical device is formed by directing a thermal energy beam onto a selected portion of the wide-bandgap semiconductor substrate for changing an optical property of the selected portion to form the optical device in the wide-bandgap semiconductor substrate. The thermal energy beam defines the optical and physical properties of the optical device. The optical device may take the form of an electro-optical device with the addition of electrodes located on the wide-bandgap semiconductor substrate in proximity to the optical device for changing the optical property of the optical device upon a change of a voltage applied to the optional electrodes. The invention is also incorporated into a method of using the optical device for remotely sensing temperature, pressure and/or chemical composition. |
申请公布号 |
US8912549(B2) |
申请公布日期 |
2014.12.16 |
申请号 |
US201113068129 |
申请日期 |
2011.05.03 |
申请人 |
University of Central Florida |
发明人 |
Quick Nathaniel R.;Kar Aravinda;Salama Islam A. |
分类号 |
H01L21/322;H01L31/0312;H01L31/0352;G01J5/08;G01K11/12;H01L21/268;G01J5/58 |
主分类号 |
H01L21/322 |
代理机构 |
Frijouf, Rust & Pyle P.A. |
代理人 |
Frijouf, Rust & Pyle P.A. |
主权项 |
1. An optical device, comprising:
a wide-bandgap semiconductor substrate having a first optical property; an optical device defined within said wide-bandgap semiconductor substrate having a second optical property different from said first optical property; said optical device being defined by a plurality of optical surfaces; and all of said plurality of optical surface being internal to said wide-bandgap semiconductor substrate. |
地址 |
Orlando FL US |